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|Atomic Layer Deposition|
Principles, Characteristics, and Nanotechnology Applications
Edited by Tommi Kääriäinen, David Cameron, Marja-Leena Kääriäinen, and Arthur Sherman
Copyright: 2013 | Status: In Production | Expected Pub Date:May 30, 2013 | Hardcover
This is the first practical ALD book which goes extensively into applications as well as the foundations of theory, including fundamental aspects such as films and materials.