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Materials and Failures in MEMS and NEMS

Edited by Atul Tiwari and Baldev Raj
Series: Materials Degradation and Failure
Copyright: 2015   |   Status: Published
ISBN: 9781119083603  |  Hardcover  |  
420 pages | 272 illustrations
Price: $195 USD
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One Line Description
Provides unique and critical information for engineers to gain precise control over dimensional stability, quality, reliability, productivity and maintenance in MEMS and NEMS.

Audience
The book will be read by materials scientists, chemists, engineers, nanotechnologists, etc., who work in the interdisciplinary area of science, engineering and technology focused on MEMS & NEMS devices, as well as engineers in industry that manufacture these devices.

Description
The invention of Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems(NEMS) fabrication technologies has revolutionized the science and engineering industry and it is now estimated it will be valued at $200 billion in 2025. Novel materials and technologies are being explored to overcome the challenges in fabrication or manufacturing processes with the aim to integrate multiple devices on a single chip. This book, which looks at these new materials as well as their failures, includes chapters (amongst others) written by eminent experts in the area of MEMS and NEMS in the following areas:
• C-MEMS fabrication technologies involving patterning of polymeric precursors of carbon
• The design of MEMS heat exchangers such as heat sinks, heat pipes and two-fluid heat exchangers
• MEMS and NEMS switches using Si-to-Si contact
• Design challenges during fabrication and failure analysis of cMUT devices
• The inverse problems in micro- and nanomechanical resonators as well as the stiction test of MEMS and NEMS
• The control of ohmic RF-MEMS switches operating under different actuation modes
• Design methodologies and available simulation packages to model and simulate MEMS devices
• The buckling behavior of a typical micron-scale constantan-wire/polymer-substrate structure under electrical loading
• The inherent challenges encountered in CMOS–MEMS along with the possibility of integration at board and chip levels
• The application of porous silicon in MEMS and sensors technology
• Mathematical models to determine strategies for preventive replacement and inspection for MEMS that are subject to multiple dependent competing failure processes

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Author / Editor Details
Atul Tiwari currently serves as Director, Research and Development at Pantheon Chemical Company in Phoenix, USA. Previously, Dr. Tiwari has served as research faculty member in the Department of Mechanical Engineering at the University of Hawaii, USA. He received his PhD in Polymer Materials Science and second master degree in Mechanical Engineering along with the bestowed Chartered Chemist and Chartered Scientist status from the Royal Society of Chemistry,UK. Being an organic chemist and mechanical engineer his research work tends to bridge the gap between the science and engineering. His area of research interest includes the development of smart materials including silicones, graphene and bio-inspired biomaterials for industrial applications. Dr. Tiwari has published more than 70 peer reviewed research publications including 15 books, as well as 6 international patented/pending technologies that have been transferred to industry.

Dr. Baldev Raj is currently Director, National Institute of Advanced Studies, Bangalore after serving as Director of Indira Gandhi Centre of Atomic Research. He has pioneered the application of Non Destructive Evaluation for basic research using acoustic and electromagnetic techniques in a variety of materials and components and is an acknowledged expert in Materials, Heritage and Education. He has served as president for numerous national and international institutions. He has authored more than 959 publications in refereed journals, 79 books and special journal issues, more than 39 contributions to encyclopaedia and handbooks, and is the owner of 29 patents. He has been
recognized with more than 100 international and national awards.

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Table of Contents
Preface

1 Carbon as a MEMS Material
Amritha Rammohan and Ashutosh Sharma

2 Intelligent Model-Based Fault Diagnosis of MEMS
Afshin Izadian

3 MEMS Heat Exchangers
B. Mathew and L. Weiss

4 Application of Porous Silicon in MEMS and Sensors Technology
L. Sujatha, Chirasree Roy Chaudhuri and Enakshi Bhattacharya

5 MEMS/NEMS Switches with Silicon to Silicon (Si-to-Si) Contact Interface
Chengkuo Lee, Bo Woon Soon and You Qian

6 On the Design, Fabrication, and Characterization of cMUT Devices
J. Jayapandian, K. Prabakar, C.S. Sundar and Baldev Raj

7 Inverse Problems in the MEMS/NEMS Applications
Yin Zhang

8 Ohmic RF-MEMS Control
M. Spasos and R. Nilavalan

9 Dynamics of MEMS Devices
Vamsy Godthi, K. Jayaprakash Reddy and Rudra Pratap

10 Buckling Behaviors and Interfacial Toughness of a Micron-Scale Composite Structure with a Metal Wire on a Flexible Substrate
Qinghua Wang, Huimin Xie and Yanjie Li

11 Microcantilever-Based Nano-Electro-Mechanical Sensor Systems:Characterization, Instrumentation, and Applications
Sheetal Patil and V.Ramgopal Rao

12 CMOS MEMS Integration
Thejas and Navakanta Bhat

13 Solving Quality and Reliability Optimization Problems for MEMS with Degradation Data
Yash Lundia, Kunal Jain, Mamanduru Vamsee Krishna, Manoj Kumar Tiwari and Baldev Raj

Index

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Description
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